What is DC Sputtering?
DC or Direct Current Sputtering is a Thin Film Physical Vapor Deposition (PVD) Coating technique where a target material to be used as the coating is bombarded with ionized gas molecules causing atoms to be “Sputtered” off into the plasma. These vaporized atoms are then deposited when they condense as a thin film on the substrate to be coated.
DC Sputtering is the most basic and inexpensive type of sputtering for PVD metal deposition and electrically conductive target coating materials. Two major advantages of DC as a power source for this process is that it is easy to control and is a low cost option if you are doing metal deposition for coating.
DC Magnetron sputtering uses magnets behind the negative cathode to trap electrons over the negatively charged target material so they are not free to bombard the substrate, allowing for faster deposition rates.
What is RF Sputtering?
RF or Radio Frequency Sputtering is the technique involved in alternating the electrical potential of the current in the vacuum environment at radio frequencies to avoid a charge building up on certain types of sputtering target materials, which over time can result in arcing into the plasma that spews droplets creating quality control issues on the thin films – and can even lead to the complete cessation of the sputtering of atoms terminating the process.
Traditional DC Sputtering is a cost effective way of applying metal target coatings that are electrical conductors like gold. However, DC Sputtering is limited when it comes to dielectric target materials – coatings which are non-conducting insulating materials that can take on a polarized charge. Examples of common dielectric coating materials used in the semiconductor industry include Aluminum Oxide, Silicon Oxide and Tantalum Oxide.
RF Magnetron sputtering uses magnets behind the negative cathode to trap electrons over the negatively charged target material so they are not free to bombard the substrate, allowing for faster deposition rates.
Compared with DC sputtering coating technology, RF Deposition rate is lower.
For the target materials, DC sputtering can use conductive material only, while RF sputtering can use all the target materials.
Kunshan Puyuan Vacuum Technology Engineering Co.,Ltd.
Post time: Dec-16-2019