Electron beam evaporation is that the membrane is put into the water-cooled copper crucible, heated by direct use of electron beam, the vaporized atoms or molecules of membrane material is condensed to a mould by incidence to the surface of the substrate after escaping from the surface evaporation. Electron beam evaporation has high thermal efficiency, beam density, evaporation speed, high purity of film made than the resistance heating evaporation.
Optical Coating Machine can coat layers more short pass, long wave pass, antireflection film, reflective film, filter membrane, beam splitter, band-pass film, dielectric film, highly reflective film, reflective film of various color film system , can achieve 0-50 layer membranes based coating, but also to meet such as automotive reflective glass, glasses, optical lens, cold cups and other products coating requirements. Configure different evaporation sources, electron gun and ion source and a film thickness meter can be coated various membrane system, metal, oxides, compounds and other high melting membrane can be deposited.
1) Optical coating Machine is equipped with a quartz crystal thickness meter, adopts PLC and touch screen systems combined to achieve automatic control of the entire work process , work efficiency and product quality excellent repeatability consistency .
2) It applies to the field of optics industry, large-scale industrial production requires manufacturers to use .
|Pumping speed||It will take less than 10 minutes from air pump to 9*10-3Pa|
|Pressure rising rate||0.67Pa/h|
|Ion source||1-2 sets (different optical choice)|
|Ion source power||5KW—12KW, 1-2 sets (different optical choice)|
|Electronic gun||10KW 270°E-type gun 1—3 sets|
|resistance||Evaporation power :1 set, 1—3pcs boat evaporation source|
|crucible||4—16Automatic rotating copper crucible|
|pump||Diffusion pump or molecular pump (optional cold trap)|
|heating||According different products , heating system will be different from 18——80KW|
|Work frame||It can be customized designed，rotation speed can be controlled|
|gas||Precision meter control 1-4 road work gas|
|dam-board||One set of crucibles, boats, fixed damper|
|Film thickness control instrument||Inficon brand : 1 set|
|control mode||Manual, semi-automatic and fully automatic control; Control panel use Chinese and English language|